smartWLI technology advantages of high performance measuring technologies coherence scanning interferometer interferometry objectives interferences of white light spectral optimization for noise reduction HD-EPSI (high density-extended phase shift interferometry) HD-EPSI and comparison to the profile averaging profile averaging comparison between HD-EPSI and the profile averaging advantage of extreme fast prescans advanced algorithms for steep surface features samples for steep concave and convex surfaces firebolt, 5x objective – 3d printed metal surface acceleration using decimation acceleration using ROIs (reduced areas of interest) point density and optical lateral resolution microscope image analysis compared to the 3d scanning practical tests of the system resolution comparison to tactile measurements sampling theorem / optical resolution scratches of an stylus instrument on an roughness standard correct measurement of tracible roughness standards smartSTITCH perfect scans of larger areas