Page 9 - smartWLI technology
P. 9
surface metrology with highest z - resolution
height resolution / nm
80
40
20
10
16
focus variation
8
4
2
confocal microscopy
0,1 0,1 0,1 0,1 white-light interferometry
100x 50x 20x 10x
The white-light interferometry provides the necessary height
resolution using lower magnification objectives and adequate field of
view for roughness measurements!
Ra = 25 nm
