Page 7 - smartWLI technology
P. 7

objectives for adapted measuring fields





























                      magnification          2.5x*             5x               10x              20x              50x             100x
                                  WD         10.3              9.3              7.4              4.7              3.4               2

         prime/extended/compact                                  5 MP – 2456 x 2054 pixel / measuring points
             measuring field / mm²         6.8 x 5.7        3.4 x 2.8        1.7 x 1.4       0.85 x 0.71      0.34 x 0.28      0.17 x 0.14

                 point spacing / µm           2.8              1.4             0.69             0.35             0.14             0.07
         prime/extended/compact                                 2.3 MP – 1900 x 1200 pixel / measuring points

             measuring field / mm²         7.3 x 4.6        3.7 x 2.3        1.8 x 1.2       0.91 x 0.58      0.37 x 0.23      0.18 x 0.12
                 point spacing / µm           3.8              1.9             0.96             0.48             0.19              0.1

              Cylinderinspector 3D                               4 MP – 2000 x 2000 pixel / measuring points
             measuring field / mm²             -            2.8 x 2.8        1.4 x 1.4       0.71 x 0.71      0.28 x 0.28      0.14 x 0.14

                 point spacing / µm            -               1.4             0.69             0.35             0.14             0.07


        * the 2.5x objective is not available for the smartWLI extended

                                                                                                                                    Ra = 25 nm
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