Measurement of cutting edges
The combined evaluation of geometry and surface structures of cutting edges is important to understand the cutting-edge preparation in detail and to optimize the production processes.
Often used optical measuring devices based on focus variation, fringe projection and confocal microscopy hit the limits of their resolutions.
Out of this reasons SEM images are often used in the R&D to visualize the details even if this limits the quantification.
With the increased performance of the white-light interferometry are the smartWLI systems with an objective independent height resolution of 0.1 nm and measuring point distances starting from 0.07 µm able to fill this gap.