Page 4 - smartWLI prime

stand and table specification

stand

max. / fast positioning z - axis 70 mm
fine positioning z - axis 1.9 mm

tilt adjustment +- 3°

positioning tables
positioning movement load capacity resolution orthogonality encoder
area
73 x 55 mm² manual 1 kg - - -

75 x 50 mm² automated 1 kg 0.01 µm <10arcsec optional

100 x 100 mm² automated 2 kg 0.01 µm <10arcsec optional

150 x 150 mm² automated 3 kg 0.01 µm <10arcsec optional

200 x 200 mm² automated 3 kg 0.01 µm <10arcsec optional
300 x 300 mm² automated 5 kg 0.01 µm <5arcsec optional

Ra = 25 nm