Page 8 - smartWLI cutting tools
P. 8
z resolution – advantage of the white-light interferometry
height resolution / nm
80
40
20
10
16
focus variation
8
2 4
confocal microscopy
0.1 0.1 0.1 0.1 white-light interferometry
100x 50x 20x 10x
white-light interferometry: highest resolution / constant over all objectives
focus variation / confocal microscopy: reduced resolution for larger fields
(the system specific values could differ from the concrete values and has to be checked)
