Page 4 - smartWLI cutting tools
P. 4
selection of the best objective for the scanning of tool edges
high speed camera 1900 x 1200 pixel / 170 Hz
Scanning Speed up to 250 µm/s – full camera resolution
Magnification 2.5x 5x 10x 20x 50x 100x
FOV / mm² 7.3 x 4.6 3.7 x 2.3 1.8 x 1.2 0.91 x 0.58 0.37 x 0.23 0.18 x 0.12
Spacing / µm 3.8 1.9 0.96 0.48 0.19 0.1
WD / mm 10.3 9.3 7.4 4.7 3.4 2
high resolution camera 2456 x 2054 / 86 Hz
Scanning Speed up to 120 µm/s – full camera resolution
Magnification 2.5x 5x 10x 20x 50x 100x
FOV / mm² 6.8 x 5.7 3.4 x 2.8 1.7 x 1.4 0.85 x 0.71 0.34 x 0.28 0.17 x 0.14
Spacing / µm 2.8 1.4 0.69 0.35 0.14 0.07
WD / mm 10.3 9.3 7.4 4.7 3.4 2
Compromise out of best resolution, max. field of view and data quality on sloped areas
• all the objectives provide the necessary height resolution
• 20x is suitable for edges with moderate radius of 5 µm and larger with an min. angle of app. 90°
• 50x is suitable for most edges starting of app. 2.5 µm radius and an min. angle of app. 60°
• 100x is necessary for polished and coated tools with sharp edges