GBS presented in a lecture with the topic: "super resolution for coherence scanning interferometry based on advanced image processing strategies" a new method for increasing the resolution in smartWLI measurements. In summary, the following can be stated:

    • super resolution improve the measuring results:
      • increase the point density
      • reduce the noise
      • improve the profile fidelity
    • the systems can be used to measure structures with an height below 0.1 nm and achieve a profile fidelity down to app. 0.1 µm on structures below 1 µm
    • the processing on the GPGPU (general purpose graphic processing unit) enables the calculation of 3d with super resolution in real time

Download the full presentation: super resolution for coherence scanning interferometry based on advanced image processing strategies  pdf