GBS presented in September 2020 at the SpectroNet Collaboration Conference a new procedure for achieving a "Super Resolution"

GBS presented in a lecture with the topic: "super resolution for coherence scanning interferometry based on advanced image processing strategies" a new method for increasing the resolution in smartWLI measurements. In summary, the following can be stated:

• super resolution improve the measuring results:
  • increase the point density
  • reduce the noise
  • improve the profile fidelity
• the systems can be used to measure structures with an height below 0.1 nm and achieve a profile fidelity down to app. 0.1 µm on structures below 1 µm
• the processing on the GPGPU (general purpose graphic processing unit) enables the calculation of 3d with super resolution in real time

Download the full presentation: super resolution for coherence scanning interferometry based on advanced image processing strategies