Laser Precision Microfabrication Symposium

GBS presented in June 2020 at the Laser Precision Microfabrication Symposium a new process for achieving a "Super Resolution"

GBS presented in a lecture with the topic: "Optical measurement of functional surface structures measured with super resolution" a new method for increasing the resolution in smartWLI measurements. In summary, the following can be stated:

  • the systems can be used to measure functional surfaces with a seize below 1 µm
  • the algorithms used for the data evaluation have a strong influence to the practical achieved lateral resolution
  • super resolution can improve the measuring results even if the original measuring point density of the camera is already significant below the optical resolution of the used objective
  • structured height, material and geometry have a significant influence of the lateral resolution which the system can achieve
  • the DLIM parameter is a suitable tool to check the lateral resolution of the system
Download the full presentation: optical measurement of functional surfaces with superresolution  pdf